Integrated vacuum control system. System shown is the base model that includes the following components:

- Ion gauge controller for load lock
- Ion gauge controller for SPM   chamber
- Low Vacuum gauge controller for load lock
- Low Vacuum gauge for roughing line
- Turbo pump controller
- Emergency stop button
- Ion pump controller
- Circuit breaker module

Each instrument in the rack has a separate circuit breaker so shutdown of one component will not trigger a complete system shutdown. Additional circuits are provided for future expansion. A single power cord provides all power to the rack for ease of installation and an uncluttered installation.

System controller contains a PLC for automated pump down and to prevent system from venting in case of fault conditions. Turbo pump turns into generator to power controller for safe shutdown in case of power failure.

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