The Notre Dame logo shows 2nm thick oxide grown on a Ti film. Oxidation is performed by applying a potential to a conducting AFM tip and using the condensed water droplet at the tip as an electrochemical cell. The oxidized region grows, resulting in raised surface features.
Courtesy of Rajagopal Ramasubramaniam and Gregory L. Snider, Notre Dame University
The Lithography was performed with RHK's LithoEdit software, the SPM1000 controller, and PicoSPM AFM. Also see the technology brief: "Atomic Force Microscope Induced Anodic Oxidation"
Back to Results |